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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

From Particle Scale to Feature, Die and Wafer Scales

Jianfeng Luo; David A. Dornfeld

Springer Nature

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1.049,95 kr.

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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

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